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銆€銆€HBT 鑸嘑ET 鐨勫樊鍒�

銆€銆€闄や簡FET 鏄柈妤垫€у櫒浠朵互澶�(鍙湁涓€绋(l猫i)鍨嬬殑杓夋祦瀛愬弮鑸囨櫠楂旂鐨勯亱(y霉n)琛�锛岃€屼竴鍊�(g猫)闆欐サ鎬у櫒浠跺墖鎰忓懗钁楀叐绋(l猫i)鍨嬬殑杓夋祦瀛愰兘鍙冭垏閬�(y霉n)琛�)锛屽湪闆欐サ鎬у拰FET 鎶€琛�(sh霉)涔嬮枔閭勫彲浠ヨ瀵熷埌骞剧ó宸垾锛岀壒鍒ユ槸锛�

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銆€銆€? HBT 鏅堕珨绠℃槸涓€鍊�(g猫)宸ヤ綔鍦ㄥ緢楂橀浕娴佸瘑搴︿笅鐨勫瀭鐩存簼閬撳櫒浠�(>100KA/m2.鍏锋湁鏈€楂樻埅姝㈤牷鐜囩殑HBT 鐨勯浕娴佸瘑搴︾敋鑷�>1MA/cm2)銆傜敱浜庡叾鎵€鍏锋湁鐨勯珮鐩搁棞(gu膩n)鐔遍樆锛孒BT 鐨勯珮鍔熻€楁渻(hu矛)鍓婂急鍏跺浐鏈夌殑浣庨杸(m茅n)闄愰浕澹撳垎鏁ｆ€ч€欏€�(g猫)鍎�(y艒u)榛�(di菐n)銆�

銆€銆€? 闆栫劧鎴闋荤巼鍙互鏄(l猫i)浼肩殑(鐩村埌500GHz)锛屽井娉㈤洐妤垫櫠楂旂閫氬父鏄叿鏈夎純浣庨樆鎶楃殑鍣ㄤ欢锛岄€欐槸鐢辫純楂樼殑璺ㄥ皫(d菐o)鍜岃几鍏ラ浕瀹逛締(l谩i)琛ㄥ緛鐨勩€傞€欐渻(hu矛)鐢�(ch菐n)鐢熶竴浜涘悗鏋�锛屽寘鎷洐妤垫櫠楂旂杓冧綆鐨勮矤(f霉)杓夐潏鏁忓害銆�

銆€銆€鐝�(xi脿n)鏈夊伐钘�

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銆€銆€? 45-锛�65-鍜�90-nm CMOS ? 130- nm HBT SiGe ? 100- nm HEMT ? 500- nm HBT InP銆�

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銆€銆€鐣�(d膩ng)璜囧埌鎳�(y墨ng)鐢ㄦ檪(sh铆)锛屾焙瀹氬摢绋伐钘濇渶閬╁悎鐨勪富瑕佸洜绱犲彲鑳芥槸涓嬮潰骞鹃粸(di菐n)锛屽悇鑷殑鍒嗛噺鍙栨焙浜庢噳(y墨ng)鐢ㄦ儏娉�銆�

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銆€銆€鍩轰簬GaAs

銆€銆€鏈€鍒�锛孏aAs 鏅堕珨绠℃槸鍏锋湁n- 鍨嬫簼閬撶殑鑲栫壒鍩烘煹FET(MESFET)锛屽洜?y脿n)闀甀I-V 鏉愭枡涓浕瀛愮殑閬风Щ鐜囨瘮绌虹┐鐨勯伔绉荤巼澶у緱澶�銆傛渻(hu矛)濡ㄧ瀵�(sh铆)鐝�(xi脿n)MOS 绲�(ji茅)妲�(g貌u)鐨勮〃闈㈠緢寮�(qi谩ng)鐨勮不(f猫i)绫宠兘绱�(j铆)閲樻墡鏁堟噳(y墨ng)鍗绘湁鍒╀簬闁�(k膩i)鐧�(f膩)鑲栫壒鍩烘煹妤点€侻ESFET鐨勬€ц兘閫氶亷(gu貌)鎻愰珮婧濋亾鐨勬懟闆滄績搴﹁€岄€愭几鏀瑰杽;閫欐槸浠ラ浕瀛愰伔绉荤巼(鐣�(d膩ng)鎽婚洔婵冨害鎻愰珮鏅�(sh铆)锛岄伔绉荤巼涓嬮檷)鍜屾煹妤垫硠婕忛浕娴佺偤浠ｅ児(ji脿)鐨勩€傚湪1980 骞存墍寮曞叆鐨凥EMT 绲�(ji茅)妲�(g貌u)(瑕�(ji脿n)鍦�1) 鍙互鍚屾檪(sh铆)瀵�(sh铆)鐝�(xi脿n)鍏╃ó鏀瑰杽锛�1) 閫氶亷(gu貌)涓€鍊�(g猫)楂橀伔绉荤巼婧濋亾渚�(l谩i)鎻愰珮婧濋亾闆绘祦(鐢�(ch菐n)鐢熶竴鍊�(g猫)楂樿法灏�(d菐o))锛屼互鍙�2)鐢变簬瀵兘闅欏嫝(sh矛)澹樿€屾敼鍠勪簡鏌垫サ娉勬紡銆�

銆€銆€鍦�1銆丠EMT 鐣拌唱(zh矛)绲�(ji茅)妲�(g貌u)鐨勮兘甯跺湒灞曠ず浜嗗ぞ鍦ㄥ崐-绲曠罚(SI)鍩虹墖鍜屽嫝(sh矛)澹樺堡涔嬮枔鐨勭獎鑳介殭婧濋亾銆�

銆€銆€鍦ㄩ€欏€�(g猫)鍦栦腑锛屽嫝(sh矛)澹樺堡鏄� 鎽婚洔锛岄€欐剰鍛宠憲灏囨柦涓婚洔璩�(zh矛)寮曞叆鍒颁竴鍊�(g猫)妤佃杽灞ゅ収(n猫i)銆傛簼閬撲腑鐨勯浕瀛愬湪鐣岄潰鐨勯噺瀛愯偧涓⿳绱�锛岀晫闈㈠皫(d菐o)甯跺亸绉婚噺(螖Ec)鎺у埗钁楄〃闈㈠瘑搴s銆�

銆€銆€鑷緸HEMT 鎶€琛�(sh霉)鍟�(w猫n)涓栦互渚�(l谩i)锛屼汉鍊戝凡缍�(j墨ng)寮曞叆浜嗚ū澶氭棬鍦ㄦ敼鍠勬€ц兘(ns 鍜孷sate)鐨勬敼閫�(j矛n)鏂规銆傚叐绋富瑕佺殑閫斿緫鏄細1)鎻愰珮灏�(d菐o)甯跺亸绉�锛屽緸鑰屼娇寰楀湪鐣岄潰閲忓瓙鑲煎収(n猫i)绌嶇疮鏇村鐨勯浕瀛�锛屼互鍙�2)鎻愰珮婧濋亾鐨勯伔绉荤巼锛屽(sh铆)闅涗笂閫欐剰鍛宠憲鎻愰珮InGaAs 婧濋亾涓璉n 鎴愬垎鐨勫惈閲�(寰炲父瑕�(gu墨)鐨凣aAsHEMT 鐨刋in=0%鍒版渶楂橀€烮(m菐i)nP HEMT 涓殑Xin=80%)銆�

銆€銆€鐩墠锛屾鍦℅aAs 鍩虹墖涓婇枊(k膩i)鐧�(f膩)鍏╃ó椤�(l猫i)鍨嬬殑HEMT:

銆€銆€1) 鍏锋湁涓€灞lGaAs 闅滅灞ゅ拰涓€鍊�(g猫)鎳�(y墨ng)鍔汭nGaAs 婧濋亾鐨勪富娴丟aAs P-HEMT(鍋囨櫠HEMT)涓昏鏄敤鍦�20-70GHz 闋荤巼鑼冨湇鐨勪綆鍣伈鎴栧姛鐜囨噳(y墨ng)鐢ㄤ腑[11]銆�

銆€銆€2) 閲囩敤GaAs M-HEMT(鏀规€EMT)鍙互鐛插緱鏇撮珮鐨勯€熷害锛屽畠鍩烘湰涓婃槸涓€鍊�(g猫)鍦℅aAs 鍩虹墖鐨勬澗寮涚珐娌栧堡涓婄敓闀�(zh菐ng)涓€鍊�(g猫)鏅舵牸鍖归厤鐨処nP 绲�(ji茅)妲�(g貌u)(鍏锋湁涓€鍊�(g猫)ALInAs/InGaAs 鐣拌唱(zh矛)绲�(ji茅)绲�(ji茅)妲�(g貌u))銆傞€欏€�(g猫)绲�(ji茅)妲�(g貌u)寰楃泭浜嶪nP 鍩虹祼(ji茅)妲�(g貌u)杓冮珮鐨勯€熷害鍜岃垏杓冨ぇ锛岃純鑴咷aAs 鍩虹墖鐩搁棞(gu膩n)鐨勪綆鎴愭湰銆傞洊鐒剁珐娌栧堡鐨勭啽灏�(d菐o)鎬х浉鐣�(d膩ng)宸�锛屼絾閫欏€�(g猫)鎶€琛�(sh霉)鍦�100GHz 涓嬩粛鐒堕’绀哄嚭鍑鸿壊鐨勫姛鐜囧拰鍣伈鎬ц兘銆�

銆€銆€灏辨渶楂橀亱(y霉n)琛岄€熷害鍜岃純楂樼殑杓稿嚭鍔熺巼鑰岃█锛岄€欎簺鎬ц兘绱€(j矛)閷勯倓鏄敱InP PM-HEMT 渚�(l谩i)鍓�(chu脿ng)閫犵殑锛屽畠鍦�90GHz 鏅�(sh铆)瓒呴亷(gu貌)400mW锛屽苟涓斿湪300GHz 瓒呴亷(gu貌)2mW[14]銆�

銆€銆€InP HBT

銆€銆€閫ｅ悓閲囩敤鑸嘔nP 鍩虹墖鏅舵牸鍖归厤鐨勬潗鏂欑郴绲�(t菕ng)鎴愬姛鍒舵垚浜嗗櫒浠剁殑棣栫瘒鍫�(b脿o)閬撲竴璧凤紝鍦�90 骞翠唬鍚庢湡锛屾湁闂�(gu膩n)InP 鐣拌唱(zh矛)绲�(ji茅)闆欐サ鎬ф櫠楂旂(HBT)鐨勫伐浣滄寮忛倎鍏ヤ簡杌岄亾[15]銆傞€欏€�(g猫)鏉愭枡绯荤当(t菕ng)鍏锋湁鑻ュ共瓒呭嚭SiGe 鍜孏aAs 鐨勫劒(y艒u)鍕�(sh矛)锛屽寘鎷細

銆€銆€1) InGaAs(鏅舵牸鑸嘔nP 鐩稿尮閰�)鏉愭枡涓殑閬风Щ鐜囧拰闆诲瓙閫熷害姣擥aAs 鎴朣iGe 鐨勬洿楂�銆�

銆€銆€2) 鑸嘒aAs 鐩告瘮鍏锋湁杓冧綆鐨勮〃闈㈠京(f霉)鍚堥€熺巼锛屽緸鑰屽叿鏈夎純楂樼殑闆绘祦澧炵泭锛屽皫(d菐o)鑷村叾鍏锋湁鎸夋瘮渚嬬府灏忓埌杓冨皬灏哄鐨勮兘鍔�銆�

銆€銆€3) 鐢变簬鍦ㄥ熀妤典腑浣跨敤浜嗙獎鑳介殭InGaAs锛屽墖鍏锋湁姣擥aAs 杓冧綆鐨勫熀妤�-鐧�(f膩)灏勬サ闁�(k膩i)鍟熼浕澹�銆�

銆€銆€4) 鐣�(d膩ng)InP 琚敤浣滈泦闆绘サ鏉愭枡鏅�(sh铆)锛屽叿鏈夋瘮SiGe 鏇撮珮鐨勬搳绌块浕鍫�(ch菐ng)寮�(qi谩ng)搴�銆�

銆€銆€5) 鐢�(ch菐n)鍝佸叿鏈夋瘮鍏跺畠浠讳綍Si 鎴朓II-V 鏉愭枡鏇撮珮鐨勬搳绌块浕鍫�(ch菐ng)/鎴闋荤巼鐨勪箻绌�銆�

銆€銆€6) 鍦↖nGaAs 鍩烘サ鍜孖nGaAs 鐧�(f膩)灏勬サ瑕嗚搵灞�(Cap)鐨勬渶澶ф懟闆滄績搴﹁純楂�锛屽緸鑰岀敘(ch菐n)鐢熻純浣庣殑瀵勭敓鎺ヨЦ闆婚樆鍊�銆�

銆€銆€7) 鐢变簬瑷卞涓夊児(ji脿)鍗婂皫(d菐o)楂旀潗鏂欑殑鏅舵牸鑸嘔nP 鐨勭浉鍖归厤锛屽緸鑰屽叿鏈変竴绋寮�(qi谩ng)鐨勨€滅敤鑳介殭渚�(l谩i)鎿嶇副鈥滺BT 鐨勮兘鍔�銆�

銆€銆€閫欎簺骞翠締(l谩i)锛孖nP HBT 宸茬稉(j墨ng)鎿�(d膩n)璨�(f霉)璧锋渶蹇€熷熀婧�(zh菙n)鏅堕珨绠″拰闆昏矾鎬ц兘鐨勯噸浠�銆傝繎渚�(l谩i)锛屽湪Santa Barbara 鍜宨llinois 鐨勭爺绌跺皬绲勫凡缍�(j墨ng)鍫�(b脿o)閬撲簡Ft 瓒呴亷(gu貌)700GHz 鐨勫櫒浠讹紝浠ュ強Ft/Fmax 瓒呴亷(gu貌)500GHz 鐨勫钩琛″櫒浠禰16]锛孾17]銆�

銆€銆€SiGe HBT-BiCMOS

銆€銆€鍦�80 骞翠唬鍚庢湡鎵€闁�(k膩i)鐧�(f膩)鐨凷iGe HBT 鏄噰鐢ㄦ垚鐔熺殑纭呮妧琛�(sh霉)渚�(l谩i)鐢熺敘(ch菐n)鐨�銆傞€氶亷(gu貌)鍚勭ó闁�(k膩i)鐧�(f膩)锛屽寘鎷湪鍩烘サ浣跨敤纰虫懟闆滃拰鍩烘サ鑷皪(du矛)婧�(zh菙n)鐢熼暦(zh菐ng)鎶€琛�(sh霉)锛屽櫒浠跺凡閬�(d谩)鍒颁簡鍑鸿壊鐨勬€ц兘- 鐗瑰垾鏄�锛屽湪Bi-CMOS 閰嶇疆涓殑HBT 椤ず浜嗛珮鐨凢t锛孎(xi脿n)max(>300GHz)[19]銆傛澶栵紝鐢变簬鍏锋湁寰堝ソ鐨勯垗鍖栫祼(ji茅)鑰岀嵅寰椾簡鍦ㄦ贩闋诲櫒鍜屾尟钑╁櫒涓サ鐐烘湁鐢ㄧ殑鍑鸿壊鐨�1/f 鍣伈鎬ц兘銆傛墍鏈夐€欎簺鐗规€ц鐢ㄤ締(l谩i)鍒舵垚浜嗚ū澶氬彲浠ラ亱(y霉n)琛岀殑鑺墖锛屼緥濡傚湪43GHz 鍏夌簴鍌宠几绯荤当(t菕ng)涓殑澶氱敤寰�(f霉)鐢ㄥ櫒(MUX)鍜屽璺垎闆㈠櫒(DEMUX)锛岄珮閫熸ā-鏁�(sh霉)杞�(zhu菐n)鎻涘櫒[20]锛屼互鍙�77GHz 闋荤巼鐨勮粖(ch膿)鐢ㄩ浄閬�(d谩)鑺墖绲勶紝鐢氳嚦鍙敤浜庡伐浣滃湪100GHz 浠ヤ笂鐨勬敹鐧�(f膩)姗�(j墨)涓璠21]銆�

銆€銆€鍦ㄩ亷(gu貌)鍘荤殑骞惧勾涓紝闅ㄨ憲妤电煭?h脿o)鑹燨宸ヨ棟閬�(gu貌)绋嬬殑閲囩磵(鐝�(xi脿n)鍦ㄦ槸鍦�45-90nm 鐨勮寖鍦�)锛屼汉鍊戝凡缍�(j墨ng)鍫�(b脿o)閬撲簡鍏锋湁妤甸珮鎴闋荤巼鐨刵-婧濋亾MOS 鏅堕珨绠�(ft>200GHz)[22]銆傞€欑ó鑸囧崐灏�(d菐o)楂斿湅(gu贸)闅涙妧琛�(sh霉)鐧�(f膩)灞曡棈(l谩n)鍦栫浉涓€鑷寸殑绲�(ji茅)鏋滐紝瀵�(sh铆)闅涗笂鏄緸鍓嶅儏闄愪簬III-V HEMT(鏄傝泊)鐨勯浕瀛愭潫鍔犲伐宸ヨ棟閬�(gu貌)绋嬪拰瑷卞姝ｅ湪鐧�(f膩)鐢熺殑MOS 绲�(ji茅)妲�(g貌u)婕旇畩鎵€鐢�(ch菐n)鐢熺殑鏌垫サ闀�(zh菐ng)搴︽笡灏忕殑绲�(ji茅)鏋�銆傛鍍廐EMT 绲�(ji茅)妲�(g貌u)涓€妯�锛岄€氶亷(gu貌)杓冮珮鐨勯伔绉荤巼婧濋亾(渚嬪鎵€鐛插彇鐨勬噳(y墨ng)璁婄婧濋亾)浠ュ強鐢辨墍璎傜殑楂�-K 闆讳粙璩�(zh矛)鏌垫サ鎵€鐢�(ch菐n)鐢熺殑鍏锋湁鍚堥仼鐨勬哀鍖栧堡鍘氬害鑸囨簼閬撶殑闀�(zh菐ng)搴︽瘮鍊硷紝浣垮緱鎬ц兘寰楀埌浜嗗姞寮�(qi谩ng)(鐢变簬SiO2 鍙互鎻愪緵鐒�(w煤)鑸囧€瘮鐨凷i 閳嶅寲浣滅敤锛屽畠鐨勭浉灏�(du矛)浠嬮浕甯告暩(sh霉)-鍙湁4 -鍦ㄦ煹妤甸暦(zh菐ng)搴︼紝鏌垫サ鍘氬害鎸夋瘮渚嬫笡灏忔檪(sh铆)锛屽氨璁婂緱澶綆浜�)銆�

銆€銆€鍦�2銆佸湪浜掗€ｄ箣鍓�锛岀櫦(f膩)灏勬サ瀵害鐐�0.6渭m 鐨処nP DHBT 鐨勯’寰収鐗�銆侶BT 鏄噰鐢ㄤ笁灞よ嚭(t谩i)闈�(Triple-Mesa)鑷皪(du矛)婧�(zh菙n)宸ヨ棟鍒朵綔鐨刐18]銆�

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銆€銆€III-V 鍣ㄤ欢锛氳垏CMOS鐨勫叡鍚岄泦鎴�

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