鎽樿锛�鍦ㄥ崐灏�(d菐o)楂斿埗閫犳キ(y猫)涓�锛岀鐗囧偝杓告鍣ㄤ汉鎵挎摂钁楃簿纰哄畾浣�銆佸揩閫熸惉閬嬬瓑寰�(f霉)闆滀换鍕�(w霉)锛岄€欏皪纭呯墖鍌宠几姗熷櫒浜虹殑鎺у埗鍣ㄦ彁鍑轰簡鍤存牸鐨勮姹�锛屽洜姝ゅ皪纭呯墖鍌宠几姗熷櫒浜虹殑鎺у埗妯″閫茶绯荤当(t菕ng)鐨勭爺绌舵湁钁楅噸瑕佹剰缇�銆傛湰鏂囦互缇庡湅Delta Tau Data Systems鍏徃鐨凱MAC閬嬪嫊鎺у埗鍣ㄧ偤渚嬩粙绱逛簡PMAC鏉垮湪纭呯墖鍌宠几姗熷櫒浜烘帶鍒跺櫒涓殑鎳�(y墨ng)鐢�锛屽苟浠ヨ┎鍏徃鐨凱MAC2-PC104鍨嬫帶鍒舵澘鐐烘牳蹇�,绲�(ji茅)鍚堥浕姘ｅ拰姘ｅ嫊鍥炶矾锛岃ō(sh猫)瑷堝拰寤虹珛浜嗘サ鍧愭鍨嬬鐗囧偝杓告鍣ㄤ汉鐨勬帶鍒跺櫒锛屽鐝�(xi脿n)浜嗙鐗囧偝杓告鍣ㄤ汉鐨勫熀鏈綔妤�(y猫)閬嬪嫊銆� 闂�(gu膩n)閸佃锛�纭呯墖鍌宠几姗熷櫒浜�; PMAC閬嬪嫊鎺у埗鍣�;姗熷櫒浜烘帶鍒跺櫒 Abstract: In the semiconductor manufacturing industry, the wafer-handling robots can execute complex tasks such as precise localization, fast transporting and so on. To achieve better performance of wafer-handling robots, it is essential to carry on system research to the control units of wafer-handling robots. This paper takes American Delta Tau Data Systems Corporation is PMAC movement controller as an example, introducing PMAC board to robot controller application, designing and building a R-theta 锛坧olar coordinate锛� wafer-handling robot controller based on PMAC2-PC104. Key words: wafer-handling robot, PMAC movement controller, robot controller 娉細鍦嬪863楂樻妧琛�(sh霉)鐮旂┒鐧�(f膩)灞曡▓鍔冭硣鍔╅爡鐩紙2002AA421230锛� 1銆� 绶掕珫 纭呯墖鍌宠几姗熷櫒浜猴紙wafer-handling robot锛夋槸鍗婂皫(d菐o)楂旈泦鎴愰浕璺紙IC锛夊埗閫犳キ(y猫)涓噸瑕佺殑鍌宠几銆佸畾浣嶈ō(sh猫)鍌欙紝鍏跺伐浣滅殑閫熷害銆佸畾浣嶇簿搴﹀拰鍙潬鎬х洿鎺ュ奖闊垮埌纭呯墖鐨勭敓鐢�(ch菐n)鏁堢巼鍜屽埗閫犺唱(zh矛)閲�銆傜鐗囧偝杓告鍣ㄤ汉鍦ㄦ湁闄愮殑绌洪枔涓鐝�(xi脿n)纭呯墖宸ヤ綅鐨勫揩閫熻綁(zhu菐n)鎻�锛岄€欏皪纭呯墖鍌宠几姗熷櫒浜虹殑閬嬪嫊鐗规€с€佸弽鎳�(y墨ng)闈堟晱鎬�銆佸嫊浣滄簴纰烘€�銆佷互鍙婂伐浣滅┅(w臎n)瀹氭€у拰鍙潬鎬х瓑鏂归潰锛岄兘鏈夎純楂樼殑瑕佹眰銆傚洜姝ゅ湪瑷�(sh猫)瑷堢鐗囧偝杓告鍣ㄤ汉鎺у埗鍣ㄩ亷绋嬩腑锛岄渶瑕佸厖鍒嗚€冩叜浠ヤ笂宸ヤ綔鐗规€с€� 鍙法绋嬪杌告帶鍒跺櫒锛圥rogrammable Multi Axis Controller锛岀啊绋� PMAC锛夌偤涓€绋唬娉涙噳(y墨ng)鐢ㄥ湪宸ユキ(y猫)鎺у埗闋�(l菒ng)鍩熺殑鑷嫊鍖栨帶鍒惰ō(sh猫)鍌欙紝瀹冨彲閰嶇疆鍦ㄦ櫘閫氱殑PC骞宠嚭涓�锛屾彁渚涢枊鏀惧紡妯″鍖栫祼(ji茅)妲�(g貌u)鐨勪己鏈嶉亱鍕曟帶鍒剁郴绲�(t菕ng)锛屽悓鏅傜偤瑷堢畻姗熶綔浼烘湇鎺у埗绠楁硶鐮旂┒鍜屽鏅傜洠(ji膩n)鎺ф彁渚涗簡鏂逛究锛屼娇澶氳桓鑱�(li谩n)鍕曞弮鏁�(sh霉)鍖归厤鍖栬ō(sh猫)瑷堟洿鍔犱究鍒�銆傜鐗囧偝杓告鍣ㄤ汉鏈珨澶氱偤3鈥斺€�5鑷敱搴︾殑姗熸鑷�锛岃€孭MAC鏉胯兘鎻愪緵澶氶仈锛樿桓鐨勭崹绔嬮亱鍕曟帶鍒讹紝鎵€浠�锛岀鐗囧偝杓告鍣ㄤ汉鎺у埗鍣ㄥ畬鍏ㄥ彲浠ラ噰鐢≒MAC鏉夸綔鐐烘牳蹇冨鐝�(xi脿n)鍏跺姛鑳�銆� 2銆� PMAC閬嬪嫊鎺у埗鍣ㄧ啊浠� PMAC鍗冲彲绶ㄧ▼澶氳桓閬嬪嫊鎺у埗鍣�锛岄€氬父浠ラ珮閫烡SP 锛圖igital Signal Processor锛夌偤鏍稿績锛屼娇鐢ㄤ竴鐗囧井铏曠悊鍣ㄤ締瀵︾従(xi脿n)澶氬€嬮浕姗熺殑浼烘湇绯荤当(t菕ng)銆傜敱Delta Tau Data Systems鍏徃闁嬬櫦(f膩)鐨勯枊鏀剧祼(ji茅)妲�(g貌u)閬嬪嫊鎺у埗鍣≒MAC鏄笘鐣屼笂鍔熻兘杓冨挤鐨勯亱鍕曟帶鍒跺櫒涔嬩竴銆侾MAC閬嬪嫊鎺у埗鍣ㄤ互Motorola鐨凞SP56K绯诲垪鏁�(sh霉)瀛椾俊铏熻檿鐞嗗櫒锛圖SP-Digital Signal Processor锛夌偤鏍稿績锛屽舰鎴愭敮鎸佸绋附绶氾紙ISA銆丳CI銆乂ME銆丳C104锛夋彃妲界殑鍗″紡鐢�(ch菐n)鍝佹垨鐛ㄧ珛鐨勬帶鍒跺櫒妯″銆備竴濉婃帶鍒跺櫒鍙互鍚屾檪鎿嶇副8-32鍊嬭桓锛屽苟涓斿彲浠ュ苟鑱�(li谩n)閬嬭銆� PMAC閬嬪嫊鎺у埗鍣ㄦ墍鎺у埗鐨勬瘡涓€鍊嬭桓瀹屽叏鐛ㄧ珛锛屽嵆濉婃彃鍗″彲浠ユ搷绺�8鑷轰笉鍚屾鍣ㄧ殑8鍊嬪柈杌革紝鎴栬€呭悓涓€鑷烘鍣ㄤ腑鐨�8鍊嬭桓锛屾垨鑰呭叐鑰呬箣闁撶殑浠绘剰绲勫悎銆傚湪灏嶄己鏈嶆暩(sh霉)鎿�(j霉)鐨勮檿鐞嗚兘鍔涖€佽桓鐗规€у強杓稿叆淇¤櫉甯跺鏂归潰锛孭MAC鎺у埗鍣ㄧ敱浜庨噰鐢ㄥ皥闁€鐨勬ā濉婂寲绲�(ji茅)妲�(g貌u)锛岀法纰煎櫒杓稿叆鐨勪覆琛岃檿鐞嗛€熷害鏄ぇ澶氭暩(sh霉)鎺у埗鍣ㄧ殑10鍒�15鍊�銆傝€屼笖鍙緸楂樺垎杈ㄧ巼绶ㄧ⒓鍣ㄤ欢鎺ユ敹浣庢彃瑁滀綅鐨�5浣嶅苟琛屾暩(sh霉)鎿�(j霉)锛屽彲寰楀埌320MHz鐨勬湁鏁堣几鍏ュ付瀵�銆� PMAC閬嬪嫊鎺у埗鍣ㄥ叿鏈夋サ寮风殑闈堟椿鎬�锛屽彲閬╅厤浜庣暥鍓嶆櫘閬嶆噳(y墨ng)鐢ㄧ殑澶氱ó涓嶅悓绺界窔绲�(ji茅)妲�(g貌u)銆佷笉鍚岄鍨嬬殑闆绘銆佸弽楗嬪厓浠朵互鍙婃寚浠ゆ暩(sh霉)鎿�(j霉)绲�(ji茅)妲�(g貌u)锛屽彲闅ㄦ檪灏峆MAC纭欢閫茶鍗囩礆銆侾MAC鎺у埗鍣ㄥ厑瑷卞悓涓€鎺у埗绋嬪簭鍦ㄦ墍鏈夌附绶氫笂閬嬭锛屽悓鏅傚厑瑷辨瘡涓€杌镐笂闆绘鍜屽弽楗嬪厓浠剁殑涓嶅悓绲勫悎銆� 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