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Gateless Depletion Mode Field Effect Transistor For Macromolecule Sensing[A]. Proceedings of the 2003 International Symposium- Circuits and Systems, 2003,ISCAS 鈥�03[C], 2003. 918 -921 [4] Burgmair M., Eisels I. Contribution of the gate insulator surface to work function measurements with a gas sensitive FET[A].Proceedings of IEEE- Sensors[C], 2002. 439-442 [5] McKennoch S., Wilson D.M. Electronic interface modules for solid-state chemical sensors. Proceedings of IEEE- Sensors[C], 2002. 344-349 [6] Vamsi Krishna T, Jessing J.R., Russell D.D., et al. Modeling and design of polythiophene gate electrode ChemFETs for environmental pollutant sensing[A]. Proceedings of the 15th Biennial-University /Government /Industry Microelectronics Symposium [C], 2003: 271-274 [7] ChangZhi Gu, Liangyan Sun, Tong Zhang, et al, The design and characteristics of a porphyrin LB film ChemFET gas sensor[J], Thin Solid Film, 1996,284-285:863-865 [8] Andersson M, Holmberg M., Lundström I., et al. Development of a ChemFET sensor with molecular films of porphyrins as sensitive layer[J], Sensors and Actuators: B, 2001,锛�77锛�:567-571