鎽� 瑕侊細 寰瀷鍏夋(j墨)闆荤郴绲�(t菕ng)锛圡OEMS锛夋妧琛�(sh霉)鏄竴闁€鏂拌垐鐨勬妧琛�(sh霉)锛屽叾鎳�(y墨ng)鐢ㄦ秹鍙婂厜閫氫俊銆佸厜椤ず銆佹暩(sh霉)鎿�(j霉)瀛樺劜(ch菙)鍜屽厜瀛�(xu茅)鍌虫劅绛夎澶氭柟闈�锛岃€屽埄鐢ㄩ€欑ó鎶€琛�(sh霉)鍒朵綔鐨勫厜瀛�(xu茅)澹撳姏鍌虫劅鍣ㄦ洿鏄叿鏈夊偝绲�(t菕ng)澹撳姏鍌虫劅鍣ㄧ劇(w煤)鍙瘮鎿殑鍎�(y艒u)榛�(di菐n)銆傛湰鏂囪憲閲嶄粙绱逛簡MOEMS澹撳姏鍌虫劅鍣ㄧ殑绲�(ji茅)妲�(g貌u)銆佸伐浣滃師鐞嗕互鍙婂埗浣滃伐钘濓紝骞剁啊(ji菐n)瑕佷粙绱逛簡MOEMS澹撳姏鍌虫劅鍣ㄩ櫍鍒楃殑绲�(ji茅)妲�(g貌u)鍜屽埗浣滃伐钘�銆� 闂�(gu膩n)閸佃锛�寰瀷鍏夋(j墨)闆荤郴绲�(t菕ng)锛汳OEMS锛涘厜瀛�(xu茅)澹撳姏鍌虫劅鍣紱澹撳姏鍌虫劅鍣�锛涢櫍鍒� 涓€銆佸紩瑷€ 寰瀷鍏夋(j墨)闆荤郴绲�(t菕ng)锛圡OEMS锛夋槸寰厜瀛�(xu茅)銆佸井闆诲瓙鍜屽井姗�(j墨)姊颁笁鑰呯祼(ji茅)鍚堢殑鐢�(ch菐n)鐗�锛屼篃鏄(j墨)銆侀浕銆佸厜銆佺銆佸寲瀛�(xu茅)銆佸偝鎰熸妧琛�(sh霉)绛夊绋妧琛�(sh霉)鐨勭稖鍚�銆備綔鐐哄厜闆讳俊铏�(h脿o)杞�(zhu菐n)鎻涚郴绲�(t菕ng)锛孧OEMS鐨勬噳(y墨ng)鐢ㄩ亶鍙婂厜閫氫俊銆佸厜椤ず銆佹暩(sh霉)鎿�(j霉)瀛樺劜(ch菙)銆佽嚜閬╂噳(y墨ng)鍏夊(xu茅)鍙婂厜瀛�(xu茅)鍌虫劅绛夊鍊�(g猫)鏂归潰銆傚埄鐢∕OEMS鎶€琛�(sh霉)鍒朵綔鐨勬柊鍨嬪厜鍣ㄤ欢锛屼粙鍏ユ悕鑰楀皬锛屽厜璺枔鐩镐簰涓�?d膩ng)_妤典綆锛屽皪(du矛)鍏夌殑娉㈤暦(zh菐ng)鍜屽亸鎸笉鏁忔劅锛屽苟涓旈€氬父浠ョ鐐轰富瑕佹潗鏂欙紝寰炶€屼娇鍣ㄤ欢鐨勫厜瀛�(xu茅)銆佹(j墨)姊般€侀浕姘ｆ€ц兘鍎�(y艒u)鑹�锛涜€屼笖锛岀敱浜庨噰鐢ㄤ簡妯″鍖栬ō(sh猫)瑷�(j矛)锛屾洿鍔犳柟渚夸簡鎿�(ku貌)灞曟噳(y墨ng)鐢�銆� 鑸嘙EMS绯荤当(t菕ng)鐩告瘮杓冿紝MOEMS绯荤当(t菕ng)鐨勭祼(ji茅)妲�(g貌u)骞朵笉寰�(f霉)闆�锛屽彲鏄(sh铆)闅涘埗閫犵殑寰�(f霉)闆滅▼搴︽洿楂�锛屽(sh铆)鏂界殑鍥伴洠鏇村ぇ銆傚洜?y脿n)姗勫埌y(t菕ng)蹇呴爤鐣欏嚭涓€姊濆厜閫氶亾锛屼絾鏄叾鏍稿績鑺墖鍗昏瀵嗛枆灏佽浠ラ槻鏁忔劅鐨勫厜瀛�(xu茅)鍣ㄤ欢鍙楀埌澶栫晫鍏夌窔鐨勫奖闊匡紝鍏堕棞(gu膩n)閸垫槸閬哥敤浣曠ó鏉愭枡鍦ㄥ瘑闁夊皝瑁濆収(n猫i)鍋氬嚭灏�(d菐o)鍏夎搵鎴栧ぉ绐�銆傜洰鍓嶉洊鏈夊绋潗鏂欏彲渚涢伕鎿�锛屼絾鏄ぇ澶氭暩(sh霉)澶╃獥閮介噰鐢ㄩ櫠鐡锋垨閲戝爆浠ョ⒑淇濊壇濂界殑瀵嗗皝鎬ц兘銆� 鑸囧偝绲�(t菕ng)宸ヨ棟鐨勫偝鎰熷櫒鐩告瘮锛岀敤MOEMS鎶€琛�(sh霉)鍒朵綔鐨勫偝鎰熷櫒鍏锋湁瑷卞鍎�(y艒u)榛�(di菐n)锛屽鍙互鍦ㄥ毚(y谩n)閰风殑鐠�(hu谩n)澧冧笅宸ヤ綔锛屾湁寰堝ぇ鐨勫偝杓稿付瀵�銆佸緢楂樼殑闈堟晱搴�銆侀熆鎳�(y墨ng)閫熷害寰堝揩锛涜€屼笖锛岀暥(d膩ng)鍏夎В瑾�(di脿o)鎶€琛�(sh霉)琚噳(y墨ng)鐢ㄤ互鍚�锛屽彲浠ュ(sh铆)鐝�(xi脿n)澶氬偝鎰熷櫒涔嬮枔鐨勭浉浜掑晱瑭1]銆傚鍦ㄤ竴鍊�(g猫)MOEMS鍌虫劅鍣ㄩ櫍鍒椾腑浣跨敤娉㈠垎寰�(f霉)鐢紙WDM锛夋妧琛�(sh霉)鍚�锛屼俊铏�(h脿o)鐨勬敹闆嗗氨鏈�(hu矛)璁婂緱鏇寸啊(ji菐n)鍠�锛涘悓鏅�(sh铆)锛岃垏浠ュ墠浣跨敤闆昏В瑾�(di脿o)鐩告瘮锛屾晥鐜囦篃澶х偤鎻愰珮銆� 浜�銆丮OEMS 澹撳姏鍌虫劅鍣ㄧ殑鍒嗛鍙婄祼(ji茅)妲�(g貌u) 鍏夊(xu茅)澹撳姏鍌虫劅鍣ㄦ槸MOEMS鍌虫劅鍣ㄤ腑鐨勪竴绋�锛屽洜?y脿n)妲鏄ц棝鏂囷紱铓ㄥ梽锛欓カw锛屽張琚ū鐐哄厜绾栧鍔涘偝鎰熷櫒銆傛牴鎿�(j霉)娓�(c猫)閲忓師鐞�锛屽厜瀛�(xu茅)澹撳姏鍌虫劅鍣ㄦ湁骞剧ó涓昏鐨勯鍨嬶細鍏夐牷鐜囧紡澹撳姏鍌虫劅鍣�銆佸厜寮�(qi谩ng)寮忓鍔涘偝鎰熷櫒銆佺浉浣嶅紡锛堝共娑夊紡锛夊鍔涘偝鎰熷櫒鍜屽亸鎸厜寮忓鍔涘偝鎰熷櫒锛岃€岄€欏叾涓�锛屽亸鎸厜寮忓鍔涘偝鎰熷櫒鍙互琚湅鎴愭槸鍏夊挤(qi谩ng)寮忓鍔涘偝鎰熷櫒鐨勪竴绋�銆� 鍏夊挤(qi谩ng)寮忓鍔涘偝鎰熷櫒鏄祼(ji茅)妲�(g貌u)鏈€鐐虹啊(ji菐n)鍠殑涓€绋�锛屽畠鐢卞厜婧�銆佸厜绾栨潫銆佺鑶滃拰淇¤櫉(h脿o)鎺ユ敹鍣ㄦ(g貌u)鎴�锛屽叾涓�锛屽厜绾栨潫鐢变竴鏍瑰偝閫佸厜绾栧拰鍦嶇篂鍦ㄥ畠鍛ㄥ湇鐨勬帴鏀跺厜绾栫祫绲勬垚銆傚厜婧愪竴鑸噰鐢ㄧ櫦(f膩)鍏変簩绱�(j铆)绠�锛屽叾鐧�(f膩)鍑虹殑鍏夋潫缍�(j墨ng)閬庡偝閫佸厜绾栧埌閬�(d谩)纭呰啘锛屽緸纭呰啘鍙嶅皠鍚�锛屾帴鏀跺厜绾栫祫灏囧叾鍌抽€佸埌淇¤櫉(h脿o)鎺ユ敹鍣�锛屾渶绲傝綁(zhu菐n)鎻涚偤闆讳俊铏�(h脿o)杓稿嚭銆傞€欑ó鍌虫劅鍣ㄧ殑绮惧害闆栫劧涓嶅お楂�锛屼絾鏄祼(ji茅)妲�(g貌u)绨�(ji菐n)鍠�锛屽埗浣滆捣渚嗙浉灏�(du矛)绨�(ji菐n)鍠€� 鐩镐綅寮忓鍔涘偝鎰熷櫒鏄垜鍊戜粙绱圭殑閲嶉粸(di菐n),瀹冩湁鍏╃ó椤炲瀷锛氫竴绋偤鍏�(n猫i)缃惡鐝€锛團abry锛峆erot锛夊共娑夊剙寮�锛屽彟涓€绋槸鍏�(n猫i)缃潪骞宠　Mach鈥擹ehnder骞叉秹鍎€寮忋€傜惡鐝€骞叉秹鍎€寮忕殑涓荤祼(ji茅)妲�(g貌u)锛堣鍦�1锛夌敱鍌宠几鍏夌簴銆佷竴鍊�(g猫)甯跺湏鏌卞瀷绌鸿厰鐨勭幓鐠冨熀搴曞拰纭呰啘绲勬垚锛岀钖勮啘瑕嗚搵鍦ㄧ┖鑵旂殑涓€闈紝鍏夌簴鍓囩┛閬庣幓鐠冩澘锛屾妸鍏夋潫鍨傜洿鍏ュ皠鍒扮鑶滃拰绌鸿厰鐨勪氦鎺ラ潰涓�?锛熸定鍧忚啲鎿呭珨缁嗛骞哥矉鈧�(g猫)鍗婇€忚啘锛岄€欏€�(g猫)鍗婇€忚啘鍙互鏄噾灞啘鎴栨槸浠嬭唱(zh矛)鑶�锛岄€欐ǎ渚跨祫鎴愪簡涓€鍊�(g猫)鐞虹弨骞叉秹鍎€銆傚伐浣滄檪(sh铆)锛屽厜婧愮櫦(f膩)鍑虹殑婵€鍏夋潫缍�(j墨ng)閬庢寮﹁(di脿o)鍒跺悗鐓у皠纭呰啘锛岀鑶滃惛鏀跺厜鑳藉悗灞€閮ㄧ櫦(f膩)鐢熷舰璁�锛屽舰璁婂懆鏈熻垏瑾�(di脿o)鍒跺厜鐨勫懆鏈熶竴鑷�锛屽洜姝ょ暥(d膩ng)鍏夋簮鐨勮(di脿o)鍒堕牷鐜囪垏纭呰啘鐨勫井褰㈣畩鍥烘湁闋荤巼涓€鑷存檪(sh铆)锛岀鑶滅殑鍛ㄦ湡褰㈣畩婕旇畩?y艒u)姗笴鎸痆2]銆傚叆灏勫厜鍦ㄥ厜绾栨湯绔弽灏勭殑閮ㄥ垎鑸囧湪纭呰啘琛ㄩ潰鍙嶅皠鐨勯儴鍒嗕箣闁撴渻(hu矛)褰㈡垚骞叉秹锛屾脯(c猫)寰楃殑骞叉秹鍏夊挤(qi谩ng)鐨勮(di脿o)鍒堕牷鐜囧氨鏄鑶滅殑璜ф尟闋荤巼銆傜暥(d膩ng)寰呮脯(c猫)澹撳姏寮曡捣钖勭鑶滅殑褰㈣畩鏅�(sh铆)锛屽叐鍊�(g猫)鍗婇€忚啘涔嬮枔鐨勮窛闆㈢櫦(f膩)鐢熸敼璁�锛岄€欑ó鏀硅畩鏈�(hu矛)灏�(d菐o)鑷存暣鍊�(g猫)绌鸿厰鐨勮鎸牷鐜囩敘(ch菐n)鐢熻畩鍖栵紝浣胯鎸牷鐜囪垏寰呮脯(c猫)澹撳挤(qi谩ng)褰㈡垚灏�(du矛)鎳�(y墨ng)闂�(gu膩n)绯�銆傞€欑ó绲�(ji茅)妲�(g貌u)鐨勯棞(gu膩n)閸靛弮鏁�(sh霉)鏄鑶滅殑鍘氬害銆佺┖鑵旂殑鐨勬繁搴﹀拰绌鸿厰鐨勭洿寰�锛屾纰虹殑閬告搰閫欏咕鍊�(g猫)鍙冩暩(sh霉)鍙互淇濊瓑鍌虫劅鍣ㄥ湪涓嶅悓鐨勫鍔涜寖鍦嶅収(n猫i)鑳藉鐢�(ch菐n)鐢熺窔鎬х殑闊挎噳(y墨ng)銆� 閫欑ó澹撳姏鍌虫劅鍣ㄦ湁鍏╁ぇ鍎�(y艒u)榛�(di菐n)锛氫竴鏄珮闈堟晱搴�锛屾瘮濡傝鐣�(d膩ng)纭呰啘鐨勫舰璁婂彧鏈� 0.25 µm鏅�(sh铆)锛屽叾鍙嶅皠绯绘暩(sh霉)鍙互寰�0.5璁婂寲鍒�0锛涜€屼笖锛岄厤鍚堥珮寮�(qi谩ng)搴︽縺鍏�锛岃┎绋偝鎰熷櫒鑳藉鐢�(ch菐n)鐢熷緢楂樼殑鍒嗚鲸鐜�銆傜浜屽€�(g猫)鍎�(y艒u)榛�(di菐n)鏄珨绌嶅皬锛岃€岀涓夊€�(g猫)鍎�(y艒u)榛�(di菐n)鍓囨槸灏�(du矛)婧愬姛鐜囨尝鍕�(d貌ng)涓嶆晱鎰�銆傜暥(d膩ng)鐒�锛岄€欑ó鍌虫劅鍣ㄤ篃鏈変竴浜涚己榛�(di菐n)锛屾渶鏄庨’鐨勫氨鏄祼(ji茅)妲�(g貌u)寰�(f霉)闆滃拰宸ヨ棟瑕佹眰杓冮珮?锛熸定绮�?n猫i)鐨勫叐鍊�(g猫)鍗婇€忚啘蹇呴爤淇濇寔閬╃暥(d膩ng)?sh霉)鏈ㄥ毌x锛屼笖閭勫繀闋堥潪甯稿厜婊�锛岄€欎竴鍒囬兘绲﹀埗閫犲伐钘濆付渚嗕簡寰堝ぇ鐨勫洶闆ｃ€� 鐩镐綅寮忓厜瀛�(xu茅)澹撳姏鍌虫劅鍣ㄧ殑鍙︿竴绋鍨嬫槸鍩轰簬闈炲钩琛鈥擹骞叉秹鍎€鐨勫鍔涘偝鎰熷櫒銆傚畠鏄敱鍦ㄥ悓涓€鍊�(g猫)纭呯墖涓婂姞宸ュ嚭鐨勫姏鏁忕鑶滃拰涓€鍊�(g猫)闈炲钩琛鈥擹骞叉秹鍎€绲勬垚鐨�銆侻鈥擹骞叉秹鍎€鐨勪竴鑷傦紙鎰熸噳(y墨ng)鑷傦級鏀剧疆鍦ㄧ鑶滅殑閭婄罚锛岃€屽叾鍙︿竴鑷傦紙鍙冭€冭噦锛夊墖閬�(yu菐n)闆㈢鑶�銆傚湪宸ヤ綔鐙€鎱�(t脿i)涓�锛屽厜婧愮櫦(f膩)鍑虹殑鍏夋潫缍�(j墨ng)閬庝竴鍊�(g猫)娉㈠皫(d菐o)绠″垎鐐虹瓑寮�(qi谩ng)搴︾殑鍏╂潫鍏�,瀹冨€�?c猫)璇撳潖涔矻(zh菐ng)搴︾殑鍏╁共娑夎噦涓偝杓稿悗鐢�(ch菐n)鐢熶竴瀹氱殑鍏夌▼宸�锛岀浉浣嶅洜姝や笉鍚�锛屾渶绲傚湪鍙︿竴鍊�(g猫)娉㈠皫(d菐o)绠′腑鐢�(ch菐n)鐢熷共娑夊苟杓稿嚭銆傜暥(d膩ng)澹撳姏浣跨鑶滅櫦(f膩)鐢熷舰璁婃檪(sh铆)锛岄€氶亷鍏夊綀鏁堟噳(y墨ng)锛屾敼璁婁簡娉㈠皫(d菐o)妯″紡鐨勬湁鏁堢郴鏁�(sh霉)锛屽洜鑰屼娇骞叉秹鍎€鐨勮几鍑哄厜寮�(qi谩ng)琚敼璁婂苟琚娓�(c猫)鍒�锛岄€氶亷妾㈡脯(c猫)鍒扮殑鍏夊挤(qi谩ng)鍗冲彲鐭ュ鍔涚殑璁婂寲銆� 鏈€鍚庝粙绱逛竴涓嬪亸鎸厜寮忓鍔涘偝鎰熷櫒锛岄€欑ó鍌虫劅鍣ㄤ篃鍙椤炵偤鍏夊挤(qi谩ng)澹撳姏鍌虫劅鍣ㄣ€傚叾宸ヤ綔鍘熺悊鐐猴細鍏ュ皠鍏夌稉(j墨ng)閬庤捣鍋忓櫒鍚庤畩鎴愮窔鎬х殑鍋忔尟鍏�锛屾煇浜涚壒瀹氭柟鍚戠殑鍏夌窔鍏佽ū閫氶亷銆傛帴涓嬩締锛屽厜鏉熼€氶亷鍏夊綀鐗╄唱(zh矛)鍚�锛屼互鍨傜洿浜庡鍔涘偝鎾殑鏂瑰悜鍑哄皠銆傚嚭灏勫厜缍�(j墨ng)閬庡彟涓€鍊�(g猫)鍋忓厜閺★紝鍏跺偝鎾柟鍚戣垏绗竴鍊�(g猫)鍋忓厜閺＄浉鍚�銆傜暥(d膩ng)澹撳姏浣垮厜褰堟€х墿璩�(zh矛)鐧�(f膩)鐢熷舰璁婂悗锛屽厜鏉熺殑鍋忔尟鏂瑰悜鐧�(f膩)鐢熸敼璁�锛岃嚧浣块€忛亷绗簩鍊�(g猫)鍋忓厜閺＄殑鍏夋潫寮�(qi谩ng)搴︾櫦(f膩)鐢熸敼璁�銆傞€氶亷妾㈡脯(c猫)鍑哄皠鍏夊挤(qi谩ng)鐨勮畩鍖栵紝鍗冲彲娓�(c猫)寰楀鍔涘ぇ灏�銆傞€欑ó鍌虫劅鍣ㄦ槗鍙楁韩搴﹀奖闊匡紝鍥犳澶氱敤浜庨潨鎱�(t脿i)澹撳姏鐨勬脯(c猫)閲�銆� 涓夈€丮OEMS澹撳姏鍌虫劅鍣ㄧ殑鍒朵綔宸ヨ棟 鍩轰簬鐞虹弨骞叉秹鍎€鐨勫鍔涘偝鎰熷櫒鐨勫埗浣滃伐钘濇瘮杓冨京(f霉)闆淸4]銆傞鍏堟槸纭呰啘鐨勫埗鍙栵紝鍏跺帤搴︾殑閬告搰鍙栨焙浜庡緟娓�(c猫)鐨勫鍔涜寖鍦�锛岀洰鍓嶅鐢ㄨ秴钖勭鐗囦締浣滅偤纭呰啘锛屽洜?y脿n)妲岊儗銆嶆澋顑愭毊绌哥韩鍛€?j墨ng)閬�(d谩)鍒颁簡灏�(du矛)纭呰啘鍘氬害鐨勮姹傦紝鐩稿皪(du矛)鑸囩敤鍌崇当(t菕ng)鐨勬矇绌嶆硶鍜岀姧鐗插堡宸ヨ棟鍒舵垚鐨勭鑶�锛屽叾鍘氬害鏇磋杽锛岃唱(zh矛)閲忔洿楂�銆傛摎(j霉)鍫�(b脿o)閬擄紝鍦�(gu贸)澶栨煇鍏徃鍒朵綔鐨勮秴钖勭鐗囩殑鍘氬害鍙湁2mm宸﹀彸锛屽昂瀵哥偤4in.銆傜暥(d膩ng)鐒讹紝閫欑ó瓒呰杽鐨勭鐗囦篃绲﹀伐钘濋亷绋嬪付渚嗕簡涓嶅皯鍥伴洠銆傚叾娆℃槸鐜荤拑鐨勮檿鐞嗭紝鐜荤拑鍩哄簳鐨勬潗鏂欒閬哥敤鑰愮啽鐜荤拑锛屽叾涓婄殑绌鸿厰鍜屽祵鍏ュ厜绾栫殑閫氶亾鏄敤瓒呰伈閴嗗瓟娉曞仛鍑虹殑锛涘悓鏅�(sh铆)锛屽畠涔熺稉(j墨ng)閬庝簡寰(j墨)姊板姞宸ュ伐钘濈殑铏曠悊銆備笅涓€姝ュ墖鏄湪缍�(j墨ng)閬庡井姗�(j墨)姊板伐钘濆姞宸ョ殑鐜荤拑涓祵鍏ュ厜绾栥€傚厜绾栫殑澶栧湇鐢ㄧ挵(hu谩n)姘фü鑴傜矘鍚堝姂绶婂浐浜嗕竴鍊�(g猫)閲戝爆鐠�(hu谩n)锛岄噾灞挵(hu谩n)鍜屽厜绾栫殑鏈缍�(j墨ng)鎷嬪厜铏曠悊鍚庤畩寰楀厜婊戝钩鏁淬€傛姝ラ鐨勯棞(gu膩n)閸垫槸绮樺悎鍔戠殑閬告搰锛岀矘鍚堝姂鐨勫弽灏勭巼瑕佹瘮鍏夌簴浣�锛岄€欐ǎ鑳界⒑淇濆厜绶氫笉澶栭湶銆傛渶鍚庢槸鎶婂付鏈夌┖鑵旂殑鐜荤拑鐗囧拰纭呰啘鐢ㄩ櫧(y谩ng)妤甸嵉鍚堢殑鏂规硶绲�(ji茅)鍚堝湪涓€璧枫€� 鍩轰簬M锛峑骞叉秹鍎€鐨勫鍔涘偝鎰熷櫒鐨勯棞(gu膩n)閸靛埗浣滃伐钘濇槸鍦ㄧ鐗囦笂鍋氬嚭骞叉秹鍎€绲�(ji茅)妲�(g貌u)鍜屽姏鏁忚杽鑶�銆傚共娑夊剙绲�(ji茅)妲�(g貌u)鏄厛鎶婄鐨勬爱鍖栫墿娌夌⿳鍦ㄧ鐗囦笂锛屽啀閫氶亷鍏夊埢纰哄畾鍏跺熀鏈舰鐙€锛屾渶鍚庣敤鍒昏潟娉曞緱鍒扮殑銆傝€屽姏鏁忚杽鑶滃墖鏄厛鍦ㄧ鐗囦笂娌夌⿳SiO2锛屽啀鐢ㄥ厜鍒绘硶纰哄畾鍑鸿杽鑶滅殑鍩烘湰褰㈢媭锛屾渶绲傜敤鍚勫悜鐣版€ц厫铦曟硶鐛插緱鐨�銆� 寰炰笂闈㈢殑鏁樿堪涓�锛屾垜鍊戝彲浠ョ湅鍑�锛屽厜瀛�(xu茅)澹撳姏鍌虫劅鍣ㄧ殑鍒朵綔宸ヨ棟鏄潪甯稿京(f霉)闆滅殑銆傚洜姝�锛屾敼閫�(j矛n)宸ヨ棟娴佺▼锛岄檷浣庡伐钘濇垚鏈�锛屼篃灏辨垚鐐哄悇鍦�(gu贸)寰炰簨MOEMS鐨勭鎶€宸ヤ綔鑰呯殑棣栬鐮旂┒鐩(bi膩o)銆� 鍥涖€丮OEMS澹撳姏鍌虫劅鍣ㄩ櫍鍒� 鍌虫劅鍣ㄩ櫍鍒楁槸澶氬€�(g猫)鍌虫劅鍣ㄧ殑鏈夋(j墨)绲勫悎锛屽畠鐨勭簿搴﹂珮锛岄噸寰�(f霉)鎬уソ锛屽彲浠ラ€�(j矛n)琛屽垎甯冨紡娓�(c猫)閲�銆� 鏅€氬厜瀛�(xu茅)澹撳姏鍌虫劅鍣ㄩ櫍鍒楁槸鐢ㄥ叐鍊�(g猫)SOI锛堢绲曠罚楂旓級鏅剁墖鍒舵垚鐨�锛屾瘡涓€鍊�(g猫)鏅剁墖閮界敱瓒呰杽鐨勫柈鏅剁灞ゅ拰涓€鍊�(g猫)姘у寲鐗╂帺鍩嬪堡绲勬垚銆傚埗浣滄檪(sh铆)锛岄鍏堝湪涓€鍊�(g猫)鏅跺湏鐨勫閮ㄦ哀鍖栧嚭涓€鍊�(g猫)SiO2灞�锛屽啀鐢ㄥ厜鍒绘硶纰哄畾涓€绯诲垪绌鸿厰鐨勪綅缃�锛屾帴钁楃敤鍚勫悜鐣版€ц厫铦曟硶鍒昏潟鍑虹┖鑵�锛屽苟鍘婚櫎澶氫綑鐨凷iO2 灞�锛屾鏅�(sh铆)鐨勭┖鑵斿簳閮ㄥ氨鏄帺鍩嬪堡鐨勮〃闈�銆傜劧鍚�锛屾妸閫欏€�(g猫)鏅剁墖鍜屾湭缍�(j墨ng)铏曠悊閬庣殑鏅剁墖閸靛拰鍦ㄤ竴璧�锛屼笂闈㈡櫠鐗囩殑鍠櫠纭呭堡灏辨垚鐐鸿钃嬪湪绌鸿厰涓婄殑鍔涙晱钖勮啘锛屾暣鍊�(g猫)鍌虫劅鍣ㄩ櫍鍒楀氨褰㈡垚浜嗐€傚湒2鐐轰竴鍊�(g猫)MOEMS 鍌虫劅鍣ㄩ櫍鍒楃殑绲�(ji茅)妲�(g貌u)鍦栵紝鏁村€�(g猫)闄ｅ垪涓殑鍠€�(g猫)鍌虫劅鍣ㄩ€氶亷鍠ā鍏夌簴鐨勮几鍏ュ拰杓稿嚭渚嗛€�(j矛n)琛屾暩(sh霉)鎿�(j霉)浜ゆ彌銆傚鍦�2鎵€绀�锛岀鐗囦笂鏈変竴鍊�(g猫)纭呭熀鍏夋尝灏�(d菐o)瑙ｈ(di脿o)缍�(w菐ng)绲�(lu貌)锛屽柈鍊�(g猫)鍌虫劅鍣ㄩ€氶亷閫欏€�(g猫)缍�(w菐ng)绲�(lu貌)閫ｆ帴鍦ㄤ竴璧�锛屽畬鎴愪俊鎭氦鎻涘拰鍌宠几銆� 鍒朵綔闄ｅ垪闇€瑕佸皪(du矛)鑶滅墖鍘氬害鍜岃〃闈竴鑷存€ч€�(j矛n)琛岄潪甯稿毚(y谩n)鏍肩殑鎺у埗锛屽洜姝よ潟鍒诲伐钘濇垚鐐哄奖闊胯啘鐗囨€ц唱(zh矛)鐨勯噸瑕佷竴姝�銆傚悓鏅�(sh铆)灏佽涔熸槸闄ｅ垪鍒朵綔鐨勯潪甯搁噸瑕佺殑涓€鐠�(hu谩n)锛岃姹備娇鍌虫劅鍣ㄨ兘澶犳姷鎶楅珮婧拰寮�(qi谩ng)鐑堢殑闇囧嫊(d貌ng)锛屽苟浣垮偝鎰熷櫒鍏嶅彈闈為噸瑕佺挵(hu谩n)澧冨洜绱犵殑褰遍熆銆� 鐩墠锛岀瀛�(xu茅)瀹跺€戞鍦ㄧ爺鍒朵竴绋柊鍨嬬殑澹撳姏鍌虫劅鍣ㄦ贩鍚堥櫍鍒�锛屽畠鐨勭壒娈婁箣铏曟槸鍦ㄧ鐗囦腑鏁村悎浜嗗竷鎷夋牸鍏夌簴鍏夋煹锛屽彲浠ョ偤寰�(f霉)鍚堣几鍑烘妧琛�(sh霉)鎻愪緵涓€鍊�(g猫)闈炲父鏈夌敤鐨勫钩鑷�(t谩i)锛屼絾鏄€欑ó鍣ㄤ欢灏囨渻(hu矛)鍙楄ū澶氱挵(hu谩n)澧冨洜绱犵殑鍒剁磩锛屾瘮濡傛韩搴︾瓑銆� 鍏夊(xu茅)澹撳姏鍌虫劅鍣ㄩ櫍鍒楃稉(j墨ng)甯歌鐢ㄥ湪鎺ㄥ姏娓�(c猫)瑭︿腑锛屼互渚跨嵅寰楀湪涓€娈佃窛闆笂鐨勫鍔涘湒璀�锛屾鏅�(sh铆)锛岄櫍鍒椾腑鐨勫偝鎰熷櫒鏁�(sh霉)鐩渻(hu矛)鐩哥暥(d膩ng)?sh霉)鍑濆?銆傚洜姝ゅ璺�?f霉)鐢ㄦ妧琛�(sh霉)锛圵DM锛夊皣鏈�(hu矛)鐧�(f膩)鎻緢澶х殑浣滅敤銆� 浜�銆佺祼(ji茅)璜� MOEMS澹撳姏鍌虫劅鍣ㄦ湁钁楅潪甯稿劒(y艒u)绉€鐨勯潨鎱�(t脿i)鍜屽嫊(d貌ng)鎱�(t脿i)鐗规€�锛屽挨鍏舵槸鍦ㄦ帹鍔涙脯(c猫)瑭︾殑鍫�(ch菐ng)鍚堜腑銆傝€屼笖锛岄毃钁楀井闆诲瓙鎶€琛�(sh霉)銆佸井姗�(j墨)姊版妧琛�(sh霉)浠ュ強寰厜瀛�(xu茅)鎶€琛�(sh霉)鐨勪笉鏂风櫦(f膩)灞曞拰娣卞叆鐨勮瀺鍚�锛孧OEMS鎶€琛�(sh霉)蹇呭皣鍙栧緱鏇村ぇ鐨勮紳鐓岋紝鑰岀敤MOEMS鎶€琛�(sh霉)鍒朵綔鐨勫偝鎰熷櫒涔熷繀灏囨妸鍌虫劅鍣ㄦ妧琛�(sh霉)甯朵笂涓€鍊�(g猫)鏂扮殑楂樺害銆� 鍙冭€冩枃鐛�(xi脿n)锛� [1]. Joseph T.Boyd, Samhita Dasgupta, Howard E.Jackson. MOEMS pressure sensor for Propulsion applications[C]. MOEMS and Miniaturized Systems. Proceedings of SPIE ,Vol.4178. [2].鍚虫旦鎻�(y谩ng),鏉庣偝涔�,鏈遍暦(zh菐ng)绱�,鍔夊悰鑿�. 鍏夋縺銆佸厜鎷剧寰(j墨)姊拌鎸偝鎰熷櫒鐨勯€�(j矛n)灞昜J]. 鍗婂皫(d菐o)楂斿厜闆�锛�1999锛�1. [3] Peter L. Fuhr. Measuring with light, Part 2锛欶iber-Optic Sensing-From Theory to Practice[J]. Sensors, 2000,5. [4] Michael H Beggans, Dentcho I.Ivanov, Steven G. Fu, T.G.. Digges, Jr, K.R.Farmer. Optical pressure sensor head fabrication using ultra-thin silicon wafer anodic bonding[EB/OL]. www.njit.edu. [5] Ac谩cio L. Siarkowski, Nilton I. Morimoto, Douglas A. P. Bulla. Implementation of an optical integrated pressure sensor based on Mach-Zehnder Interferometer 锛圡ZI锛� [EB/OL]. www.lsi.usp.br